Polysilicon

Prolog Semicor Ltd has patent for growing polysilicon.

Patent

Basic parameters of polysilicom

Type  PS.KP6  PS.KP7  PS.KP8
Resistivity, Ohm*cm  0,5-3,0  3-10  >10
Life time, usec, not less  5 10 10
Average grain area, mm2, not less 5
Diameter, mm  155-170
Length, mm, not more 1000
Concentration, at/cm-3, not more

Oxygen

Carbon

1,2·1018

1·1017

0

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